This inventor holds 1 USPTO granted patent. Top assignee: Speedfam Co Ltd. Active years: 2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2021
Title: Yasushi Obara: Innovator in Local Dry Etching Technology
Introduction
Yasushi Obara is a notable inventor based in Ayase, Japan. He has made significant contributions to the field of etching technology, particularly with his innovative designs that enhance manufacturing processes.
Latest Patents
Yasushi Obara holds a patent for a local dry etching apparatus. This apparatus features a vacuum chamber that maintains a predetermined degree of vacuum, a nozzle with both a first and second end, and a discharge tube connected to a plasma generator. The design also includes an electromagnetic wave irradiation part that oscillates electromagnetic waves, which are introduced to the plasma generator, along with a spacer positioned between the nozzle and the discharge tube. This invention is crucial for improving the efficiency and precision of etching processes.
Career Highlights
Yasushi Obara is currently associated with Speedfam Co Ltd, where he applies his expertise in etching technology. His work at the company has been instrumental in advancing the capabilities of their manufacturing processes.
Conclusion
Yasushi Obara's contributions to the field of local dry etching technology exemplify his innovative spirit and dedication to enhancing industrial processes. His patent reflects a significant advancement in the technology, showcasing his role as a key inventor in this domain.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile