This inventor holds 4 USPTO granted patents. Top assignee: Fujitsu Corporation. Active years: 1987-1994.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kawasaki, JP (1990 - 1991)
- Yokohama, JP (1987 - 1994)
Company Filing History:
Years Active: 1987-1994
Title: Yasunari Motoki: Innovator in Microwave Plasma Processing
Introduction
Yasunari Motoki is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor fabrication, particularly through his innovative work in microwave plasma processing. With a total of 4 patents, Motoki has established himself as a key figure in advancing technology for integrated circuit manufacturing.
Latest Patents
Motoki's latest patents include a groundbreaking microwave plasma processing process and apparatus. This invention is particularly useful in the fabrication of integrated circuits (IC) or similar semiconductor devices. The process involves the use of plasma generated by microwaves transmitted through a microwave transmission window, which is positioned perpendicular to the electric field of the progressive microwaves in the waveguide. Another notable patent is the downstream microwave plasma processing apparatus, which features a waveguide and a microwave transmitting window. This apparatus is designed to improve the fabrication of integrated circuit semiconductor devices by generating plasma that is confined and effectively utilized for downstream plasma etching or ashing.
Career Highlights
Motoki is currently employed at Fujitsu Corporation, where he continues to develop innovative technologies in semiconductor processing. His work has been instrumental in enhancing the efficiency and effectiveness of plasma processing techniques, which are critical for modern electronics.
Collaborations
Motoki has collaborated with notable colleagues such as Shuzo Fujimura and Toshimasa Kisa. Their combined expertise has contributed to the advancement of microwave plasma technology and its applications in semiconductor manufacturing.
Conclusion
Yasunari Motoki's contributions to microwave plasma processing have significantly impacted the semiconductor industry. His innovative patents and ongoing work at Fujitsu Corporation highlight his role as a leading inventor in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile