Location History:
- Kyoto, JP (1995 - 1996)
- Hadano, JP (2000)
Company Filing History:
Years Active: 1995-2000
Title: Yasuhiro Yamakage: Innovator in Film Inspection and Micro Fabrication
Introduction
Yasuhiro Yamakage is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the fields of film inspection and micro fabrication. With a total of 3 patents, Yamakage's work has advanced the technology used in various industrial applications.
Latest Patents
One of Yamakage's latest inventions is a film inspecting apparatus. This apparatus is designed to inspect fine roughness and particle states on the surface of thin films. It utilizes a scanning type probe microscope to obtain shape data of the thin film. The data is then analyzed to identify individual particles, allowing for a thorough inspection of the thin film surface. The apparatus includes a particle analyzing device that extracts particles from the shape data and calculates relevant particle data.
Another notable invention is a focused ion beam etching apparatus. This device enables micro fabrication of wafer surfaces by emitting a focused ion beam. The apparatus jets gas through a gas introducing pipe to an ion emitter, where the gas is adsorbed to the emitter surface. A potential difference is applied to extract ions, which are then accelerated and focused into a beam for etching. This technology allows for precise pattern formation on wafer surfaces without causing damage.
Career Highlights
Yasuhiro Yamakage is currently employed at Shimadzu Corporation, a leading company in the field of precision instruments and measuring equipment. His work at Shimadzu has allowed him to develop innovative technologies that enhance the capabilities of film inspection and micro fabrication.
Collaborations
Yamakage has collaborated with notable coworkers such as Shinji Nagamachi and Ryohei Kokawa. Their combined expertise has contributed to the successful development of advanced technologies in their respective fields.
Conclusion
Yasuhiro Yamakage's contributions to the fields of film inspection and micro fabrication demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology and improving industrial processes.