Yasuhiro Shiba

Title: Yasuhiro Shiba: Innovator in Substrate Treatment Technologies

Introduction

Yasuhiro Shiba is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate treatment technologies, holding a total of 3 patents. His work focuses on developing advanced apparatuses and systems that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Yasuhiro Shiba's latest patents include innovative designs for substrate treating apparatuses. One of his patents, titled "Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate," discloses a substrate treating apparatus that performs heat treatment on a substrate. This apparatus features a heat treating plate, lift pins for substrate delivery, a lift pin drive mechanism, a casing for creating a heat treatment atmosphere, and a cooling base plate to minimize heat transmission. Notably, the lift pin drive mechanism is strategically positioned below the cooling base plate.

Another significant patent is "Substrate treating apparatus and exhaust method thereof." This invention describes a substrate treating apparatus equipped with a baking unit that heats a substrate treated with a liquid that generates sublimates upon heating. The apparatus includes a first and second bake group, an exhaust pipe system for managing exhaust gases, and a junction for fluid communication between the two exhaust paths.

Career Highlights

Throughout his career, Yasuhiro Shiba has worked with prominent companies in the industry, including Screen Holdings Co., Ltd. and Dainippon Screen Mfg. Co., Ltd. His experience in these organizations has allowed him to refine his expertise in substrate treatment technologies and contribute to various innovative projects.

Collaborations

Yasuhiro Shiba has collaborated with several talented individuals in his field, including Yasuhiro Fukumoto and Toshihiro Nakajima. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in substrate treatment.

Conclusion

Yasuhiro Shiba's contributions to substrate treatment technologies through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative designs continue to impact the field positively, showcasing the importance of advancements in substrate processing.