This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2014.
Company Filing History:
Years Active: 2014
Title: Yasuhiro Seo: Innovator in Plasma Processing Technology
Introduction
Yasuhiro Seo is a notable inventor based in Hiroshima, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that enhances substrate processing efficiency.
Latest Patents
Yasuhiro Seo holds 1 patent for his invention titled "Plasma processing apparatus and plasma processing method." This patent describes a plasma processing apparatus that includes a flow splitter for dividing a common gas into two streams. The apparatus features a central introduction portion that supplies gas to the central area of a substrate and a peripheral introducing portion that delivers gas to the substrate's peripheral region. The design includes peripheral inlets arranged around the substrate, ensuring effective gas distribution. Additionally, the apparatus allows for the introduction of an additive gas to enhance processing capabilities.
Career Highlights
Yasuhiro Seo is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has focused on advancing plasma processing technologies, which are crucial for various applications in electronics manufacturing.
Collaborations
Yasuhiro has collaborated with notable colleagues, including Naoki Matsumoto and Wataru Yoshikawa. Their combined expertise has contributed to the development of innovative solutions in the field of plasma processing.
Conclusion
Yasuhiro Seo's contributions to plasma processing technology exemplify the impact of innovation in the electronics industry. His patent and work at Tokyo Electron Limited highlight his role as a key inventor in this specialized field.