Yasuhiro Marume

Title: Yasuhiro Marume: Innovator in Semiconductor Manufacturing

Introduction

Yasuhiro Marume is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 6 patents. His innovative work focuses on improving processes and systems within the industry.

Latest Patents

One of Marume's latest patents is the "Substrate Carrier Management System and Program." This system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier, performs predetermined processing on the substrate, and transfers the processed substrate to a carrier for further use. The carrier cleaner is responsible for cleaning the carrier that has been emptied after the substrate is removed. The carrier conveyer facilitates the movement of carriers between the pre-diffusion processing apparatus and the carrier cleaner. This arrangement allows for the automatic change of carriers, enabling continuous use of cleaned carriers without the need for dedicated ones.

Another significant patent is the "Apparatus and Method for Controlling Semiconductor Manufacturing System Utilizing Recycled Wafers." This method involves preparing recycling procedure data for each type of film formed on a wafer through diffusion processing. It includes setting a recycle control number to manage recycling processing based on the prepared data and issuing recycling instructions to the recycling apparatus when a specified number of non-product wafers are accumulated.

Career Highlights

Yasuhiro Marume has established himself as a key figure in the semiconductor industry through his innovative patents and contributions. His work has focused on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Marume has collaborated with notable coworkers, including Takamasa Inobe and Masaki Ootani. Their combined expertise has contributed to the advancement of semiconductor technologies.

Conclusion

Yasuhiro Marume's contributions to semiconductor manufacturing through his innovative patents demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry and pave the way for future innovations.