The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 04, 2003

Filed:

May. 22, 2000
Applicant:
Inventors:

Yasuhiro Sato, Tokyo, JP;

Masaki Otani, Tokyo, JP;

Takamasa Inobe, Tokyo, JP;

Katsuya Ota, Tokyo, JP;

Yasuhiro Marume, Hyogo, JP;

Ryuji Takechi, Hyogo, JP;

Kenji Sakaguchi, Hyogo, JP;

Toshiyuki Watanabe, Hyogo, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; H01L 2/100 ;
U.S. Cl.
CPC ...
G06F 1/900 ; H01L 2/100 ;
Abstract

A process selection system and method enable the automatic control of the specification to equipment most suitable for each lot. Processing using this specific equipment can be performed by further selecting the most suitable equipment from equipment used for the product type. Since a plurality of equipment can be specified for each lot, the equipment can be specified from an equipment group having these plurality of equipment. The adequate number of products in process for each equipment-specific process equipment id can be calculated based on the distribution percentage ri. The equipment-specific process equipment having the maximum value of the differential Gi between the adequate number of products in process ni and the collected actual number of products in process can be determined as the equipment-specific process equipment for the lot.


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