Yasuhide Machida

Title: Inventor Yasuhide Machida: Pioneering Innovations in Charged Particle Beam Exposure

Introduction

Yasuhide Machida, an innovative inventor based in Kawasaki, Japan, has made significant contributions to the field of charged particle beam technology. With two notable patents to his name, Machida's work focuses on enhancing exposure data preparation and methodologies for charged particle beam exposure, which are critical in various applications, particularly in the semiconductor industry.

Latest Patents

Machida's latest patents include two pivotal inventions: the "Exposure Data Preparation Method" and the "Charged Particle Beam Exposure Method."

In the first patent, the exposure data preparation method for charged particle beam exposure is designed to adjust the dose for each pattern while exposing the object. This method involves classifying patterns based on target linewidth and establishing a relationship between standard doses and resultant linewidths. The process ensures that the exposure data is accurately prepared by correcting shapes and doses according to established standards.

The second patent enhances the exposure methods by acquiring exposure pattern data for various sub-fields located within a main field. It introduces steps for forming areas of different shapes, correcting pattern densities based on surrounding areas, and generating auxiliary exposure patterns when necessary. This results in a more efficient data processing method, allowing for the formation of variable areas and reducing the overall number of areas needing processing.

Career Highlights

Yasuhide Machida has built a robust career in cutting-edge technology. He has worked for prominent companies, including Fujitsu Corporation and Fujitsu Semiconductor Limited. Through these roles, he has contributed to the development of advanced technologies that drive the modern semiconductor industry forward.

Collaborations

During his career, Machida has collaborated with noteworthy colleagues such as Yasuo Manabe and Hiromi Hoshino. These partnerships have played a vital role in inspiring innovation and fostering the development of new technologies in charged particle beam applications.

Conclusion

Yasuhide Machida stands out as an inventive force in the realm of charged particle beam exposure technologies. His contributions through patents and collaborations have significantly impacted the industry, paving the way for further advancements. As the field evolves, the innovations brought forth by Machida will undoubtedly continue to influence the future of semiconductor manufacturing and beyond.