Yaoming Shi

Title: The Innovative Contributions of Yaoming Shi

Introduction

Yaoming Shi is a notable inventor based in San Ramon, CA, who has made significant contributions to the field of semiconductor technology. His work primarily focuses on optical metrology, which plays a crucial role in the manufacturing and quality control of semiconductor devices. With a patent portfolio that includes innovative methods for measuring critical dimensions of semiconductor structures, Shi has established himself as a key figure in his field.

Latest Patents

Yaoming Shi holds a patent for a method of model-based optical metrology. This patent, titled "Measuring critical dimensions of a semiconductor structure," describes a process where an area of a geometrical structure of dispersive materials on a substrate is illuminated with polarized incident electromagnetic radiation using an illuminator of a scatterometer apparatus. The spectral components of the reflected electromagnetic radiation are measured using a detector of the scatterometer apparatus. A computer is then utilized to determine parameter values that minimize an objective function representing the difference between the measured and computed spectral components based on a parameterized model of the geometrical structure. This innovative approach enhances the accuracy and efficiency of semiconductor manufacturing processes.

Career Highlights

Yaoming Shi is currently employed at KLA-Tencor Corporation, a leading company in the semiconductor industry. His work at KLA-Tencor has allowed him to apply his expertise in optical metrology to develop advanced solutions for semiconductor manufacturing challenges. With a focus on precision and innovation, Shi continues to contribute to the advancement of technology in this critical field.

Collaborations

Throughout his career, Yaoming Shi has collaborated with esteemed colleagues, including John Josef Hench and Daniel C. Wack. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in semiconductor metrology.

Conclusion

Yaoming Shi's contributions to the field of semiconductor technology through his innovative patent and work at KLA-Tencor Corporation highlight his importance as an inventor. His dedication to advancing optical metrology continues to impact the semiconductor industry positively.