Company Filing History:
Years Active: 2015-2016
Title: Yanlei Zu: Innovator in Semiconductor Technology
Introduction
Yanlei Zu is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on advancing exposure apparatuses and standard wafer fabrication methods.
Latest Patents
Yanlei Zu's latest patents include an innovative exposure apparatus and a corresponding exposure method. The exposure apparatus is designed for performing unidirectional scan-exposure. It features a base and a wafer stage group with multiple wafer stages that hold wafers and move cyclically between two positions. An alignment detection unit is positioned above the first position to detect wafer stage fiducials and alignment marks on the wafer for precise alignment. Additionally, the apparatus includes a reticle stage for loading a cylindrical reticle, which rotates around its center axis. An optical projection unit projects light through the cylindrical reticle onto exposure regions on the wafer.
Another notable patent is for a standard wafer that includes a substrate and a first layer of semiconductor material. This wafer features a bar formed over the first layer with an interlayer in between, along with sidewall spacers on either side. The materials used in the bar and the first layer are the same semiconductor material, while the interlayer and sidewall spacers are made of different oxides. A corresponding fabrication method for this standard wafer is also included in his patent.
Career Highlights
Yanlei Zu is currently employed at Semiconductor Manufacturing International Corporation, a leading company in the semiconductor industry. His work has been instrumental in developing advanced technologies that enhance semiconductor manufacturing processes.
Collaborations
Throughout his career, Yanlei has collaborated with notable colleagues, including Qiang Wu and Huayong Hu. Their combined expertise has contributed to the success of various projects in the semiconductor field.
Conclusion
Yanlei Zu is a key figure in semiconductor innovation, with a focus on exposure apparatuses and wafer fabrication methods. His contributions continue to shape the future of semiconductor technology.