Hsinchu, Taiwan

Yan-Ting Shen


Average Co-Inventor Count = 5.1

ph-index = 1


Company Filing History:


Years Active: 2022-2025

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3 patents (USPTO):Explore Patents

Title: Yan-Ting Shen: Innovator in Semiconductor Technology

Introduction

Yan-Ting Shen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the manufacturing processes of semiconductor devices, which are essential components in modern electronics.

Latest Patents

Yan-Ting Shen's latest patents include innovative methods for forming a dummy gate structure in semiconductor devices. This process involves using an amorphous polysilicon layer that undergoes a blanket deposition operation. An annealing operation is then performed to eliminate defects in the amorphous polysilicon layer, allowing it to crystallize. This transition enhances the etching process, as a dual radio frequency (RF) source etch technique is employed to improve the directionality of ions and radicals. This advancement increases the etch rate uniformity across the crystallized polysilicon layer, leading to more efficient semiconductor manufacturing.

Another notable patent involves a method of manufacturing a semiconductor device that features a fin structure. This device includes a channel region, a source/drain region, a gate dielectric layer, and a gate electrode layer. The design of the gate electrode is particularly innovative, as it incorporates a lower portion that varies in width, optimizing the device's performance.

Career Highlights

Yan-Ting Shen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have positioned him as a key player in advancing semiconductor technology.

Collaborations

Throughout his career, Yan-Ting has collaborated with talented individuals such as Yu-Li Lin and Chih-Teng Liao. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Yan-Ting Shen's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to shape the future of electronics and semiconductor manufacturing.

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