Yan Tang

Title: Yan Tang: Innovator in Gap Detection Technology

Introduction: Yan Tang is a prominent inventor based in Chengdu, China. He has made significant contributions to the field of gap detection technology. His innovative work has led to the development of a unique patent that addresses critical challenges in the inspection of mask and substrate alignment.

Latest Patents: Yan Tang holds a patent for a "Gap detection system and method, and focal plane correction method." This system is designed to inspect global gap data between a mask and a substrate. The system includes a support frame, a mask frame with an autofocus module for real-time monitoring, a wafer stage module for adjusting the substrate's position, and various inspection modules for acquiring surface topography parameters. The control system calculates global gap data by integrating position parameters, calibration parameters, and surface topography parameters after measuring the tilt angle between the mask and substrate. This innovative approach enhances the accuracy and efficiency of gap inspections.

Career Highlights: Yan Tang is affiliated with the Chinese Academy of Sciences, where he has been instrumental in advancing research and development in his field. His work has not only contributed to academic knowledge but has also practical applications in various industries.

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Conclusion: Yan Tang's contributions to gap detection technology exemplify the impact of innovative thinking in engineering and science. His patent reflects a commitment to improving inspection processes, which is vital for advancements in manufacturing and technology.