Yan-hong Liu

Title: Yan-hong Liu: Innovator in Electrostatic Chuck Technology

Introduction

Yan-hong Liu is a notable inventor based in Zhudong Township, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent related to electrostatic chuck technology. His work is essential in enhancing the efficiency and effectiveness of semiconductor fabrication processes.

Latest Patents

Yan-hong Liu holds a patent for an "Electrostatic Chuck Sidewall Gas Curtain." This patent describes an apparatus that includes a chuck for placing an object, a gas passage extending along the periphery of the outer sidewall of the chuck, and a plurality of gas holes through the sidewall portion. These features are designed to connect a gas external to the chuck to the gas passage, thereby improving the functionality of the chuck in semiconductor applications. He has 1 patent to his name.

Career Highlights

Yan-hong Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His role involves developing advanced technologies that contribute to the company's reputation for innovation and excellence in manufacturing.

Collaborations

Some of his notable coworkers include Ian Hsieh and Che-fu Chen, who collaborate with him on various projects within the company. Their teamwork is vital in driving forward the technological advancements in semiconductor manufacturing.

Conclusion

Yan-hong Liu's contributions to electrostatic chuck technology exemplify the innovative spirit within the semiconductor industry. His patent and work at Taiwan Semiconductor Manufacturing Company Limited highlight the importance of continuous innovation in enhancing manufacturing processes.