Yai-Fen Liu

Title: Yai-Fen Liu: Innovator in Flash Memory Technology

Introduction

Yai-Fen Liu is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of flash memory devices. His innovative approach has led to advancements that enhance the efficiency and performance of memory storage solutions.

Latest Patents

Yai-Fen Liu holds a patent for a "Split gate flash memory device with shrunken cell and source line array dimensions." This patent outlines a method for forming split gate electrode MOSFET devices, which includes several key steps. The process begins with the formation of a tunnel oxide layer over a semiconductor substrate, followed by the creation of a floating gate electrode layer. A masking cap is then placed over the floating gate electrode layer, and a gate electrode stack is patterned in accordance with the masking cap. The method continues with the formation of intermetal dielectric and control gate layers, which cover the substrate and the source and drain regions. The intermetal dielectric and control gate layers are then patterned into adjacent mirror image split gate electrode pairs, and a source line slot is created in the center of the gate electrode stack down to the substrate. Finally, source regions are formed through the source line slot, and drain regions are self-aligned with the split gate electrodes and the gate electrode stack.

Career Highlights

Yai-Fen Liu is currently associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work has been instrumental in pushing the boundaries of flash memory technology, making it more compact and efficient. His innovative designs have the potential to significantly impact the performance of electronic devices that rely on flash memory.

Collaborations

Yai-Fen Liu has collaborated with notable colleagues in his field, including Chia-Ta Hsieh and Hung-Cheng Sung. These collaborations have fostered an environment of innovation and have contributed to the advancement of semiconductor technologies.

Conclusion

Yai-Fen Liu's contributions to the field of flash memory technology exemplify the spirit of innovation. His patent for a split gate flash memory device showcases his expertise and commitment to enhancing semiconductor performance. Through his work at Taiwan Semiconductor Manufacturing Company Limited, he continues to influence the future of memory storage solutions.