Location History:
- Sunnyvale, CA (US) (2012)
- Santa Clara, CA (US) (2014)
Company Filing History:
Years Active: 2012-2014
Title: Xizi Dong: Innovator in Processing Chamber Technologies
Introduction
Xizi Dong is a notable inventor based in Santa Clara, CA, who has made significant contributions to the field of processing chamber technologies. With a total of 2 patents to his name, he has developed innovative methods that enhance the efficiency of cleaning processes in semiconductor manufacturing.
Latest Patents
One of Xizi Dong's latest patents is titled "Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas." This invention relates to apparatus and methods for cleaning chamber components using a cleaning plate. The cleaning plate is designed to be positioned on a substrate support during the cleaning process and features a plurality of turbulence-inducing structures. These structures create a turbulent flow of cleaning gas while the cleaning plate is rotated, increasing the retention time of the cleaning gas near the showerhead. This innovation effectively reduces concentration gradients within the cleaning plate, leading to a more efficient cleaning process. The method involves positioning the cleaning plate adjacent to a showerhead, introducing cleaning gas into the space between them, and subsequently heating and vaporizing material deposited on the showerhead's surface.
Career Highlights
Xizi Dong is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve the performance and reliability of semiconductor manufacturing processes.
Collaborations
Throughout his career, Xizi has collaborated with talented individuals such as Hua Chung and Kyawwin Jason Maung, contributing to the advancement of innovative solutions in the field.
Conclusion
Xizi Dong's contributions to processing chamber technologies demonstrate his commitment to innovation and excellence in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in cleaning processes, paving the way for more efficient manufacturing practices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.