Xinxing Tu

Title: Xinxing Tu: Innovator in Low Pressure Furnace Technology

Introduction

Xinxing Tu is a notable inventor based in Shanghai, China. He has made significant contributions to the field of low pressure furnace technology. His innovative approach has led to the development of a unique method that enhances the efficiency of furnace operations.

Latest Patents

Xinxing Tu holds a patent for a "Method for purge clean of low pressure furnace." This patent outlines a comprehensive process that includes several steps. The method begins with providing a process chamber in a standby state, where an inner wall thin film accumulates on the surface. It then involves performing temperature treatments to generate thermal stress, which causes poorly adhered thin film particles to peel off. Following this, a cleaning gas is introduced in a pulse manner to cycle purge clean the chamber, effectively removing the peeling particles. Finally, the process chamber is switched back to the standby state after the cleaning cycle concludes. This innovative method is designed to improve the maintenance and efficiency of low pressure furnaces.

Career Highlights

Xinxing Tu is currently employed at Shanghai Huali Microelectronics Corporation. His work at this company has allowed him to focus on advancements in microelectronics and furnace technology. His expertise and innovative mindset have positioned him as a valuable asset in his field.

Collaborations

Xinxing Tu collaborates with Yuhong Lang, who is also involved in similar technological advancements. Their partnership enhances the research and development efforts within their organization.

Conclusion

Xinxing Tu's contributions to low pressure furnace technology exemplify the impact of innovative thinking in the field of microelectronics. His patented method not only improves operational efficiency but also showcases the importance of continuous innovation in industrial processes.