Union City, CA, United States of America

Xiaoyu Kang


Average Co-Inventor Count = 8.0

ph-index = 1


Company Filing History:


Years Active: 2025

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1 patent (USPTO):Explore Patents

Title: Innovations of Xiaoyu Kang in Semiconductor Processing

Introduction

Xiaoyu Kang is an accomplished inventor based in Union City, CA. He has made significant contributions to the field of semiconductor processing. His innovative approach has led to the development of a unique method for cleaning chamber components.

Latest Patents

Xiaoyu holds 1 patent for his invention titled "Method of cleaning chamber components with metal etch residues." This method addresses the challenge of cleaning ruthenium (Ru) residues from semiconductor processing chamber components. The process involves exposing the residue to a Ru cleaning composition that includes hypochlorite and other Ru-based chemistries, effectively removing the unwanted material.

Career Highlights

Xiaoyu is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes. His expertise in cleaning methods has positioned him as a valuable asset to his team.

Collaborations

Xiaoyu collaborates with talented coworkers, including Wenbing Yang and Samantha Siamhwa Tan. Together, they work on advancing technologies that improve semiconductor processing.

Conclusion

Xiaoyu Kang's innovative contributions to semiconductor processing demonstrate his commitment to advancing technology in this critical field. His patent for cleaning chamber components showcases his expertise and dedication to improving manufacturing processes.

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