Xiao Xu

Title: Innovations by Inventor Xiao Xu

Introduction

Xiao Xu is a notable inventor based in Needham, MA (US). She has made significant contributions to the field of ion implantation technology, holding 2 patents that showcase her innovative approach to enhancing ion source performance.

Latest Patents

One of her latest patents is titled "System and method for extending a lifetime of an ion source for molecular carbon implants." This invention involves an ion source assembly that utilizes a source gas supply to provide a molecular carbon source gas to an ion source chamber. The system includes a source gas flow controller that regulates the flow of the molecular carbon source gas, an excitation source that forms carbon ions and radicals, and an extraction electrode that generates an ion beam. Additionally, an oxidizing co-gas supply and flow controller work together to decompose carbonaceous residues, thereby increasing the lifetime of the ion source.

Another significant patent by Xiao Xu is "Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam." This invention describes an ion implantation system where an ion source ionizes aluminum-based materials to create an ion beam. The system employs an etchant gas mixture with a controlled concentration of fluorine and a noble gas, ensuring safety while effectively generating the desired ion beam.

Career Highlights

Xiao Xu is currently employed at Axcelis Technologies, Inc., where she continues to develop innovative solutions in the field of ion implantation. Her work has contributed to advancements in semiconductor manufacturing processes, enhancing the efficiency and effectiveness of ion sources.

Collaborations

Xiao has collaborated with notable colleagues, including Neil K. Colvin and Neil J. Bassom, to further her research and development efforts. These collaborations have fostered a productive environment for innovation and technological advancement.

Conclusion

Xiao Xu's contributions to ion implantation technology through her patents and work at Axcelis Technologies, Inc. highlight her role as a leading inventor in her field. Her innovative solutions continue to impact the semiconductor industry positively.