Wook Choi

Title: Wook Choi and a Semiconductor Oxide Film Ellipsometric Amplitude Sensor

Introduction

Wook Choi is an inventor associated with the Korea Research Institute of Standards and Science in Daejeon, South Korea. His patent work includes an apparatus and method for sensing ellipsometric amplitude in a semiconductor oxide film.

Latest Patents

Choi is named on one patent, titled “Apparatus and Method for Semiconductor Oxide Film Ellipsometric Amplitude Sensor.” The invention describes a sensor built around a micro-channel structure, a dielectric thin film, and a sample adsorption layer. Polarized light passes through an incidence window and illuminates the sample at an angle selected to meet p-wave or s-wave anti-reflection conditions. A detection unit measures the reflected p-wave and s-wave light separately to determine an ellipsometric amplitude angle. The design combines optical measurement with a micro-channel arrangement for analyzing samples at the film surface.

Career Highlights

Choi’s listed patent activity connects his work with optical sensing and semiconductor oxide film measurement. His affiliation with the Korea Research Institute of Standards and Science places this invention within a research and standards-focused institutional setting. The patent record lists 1 patent for him.

Collaborations

Dong Hyung Kim is identified as Choi’s coworker. The available information does not specify whether Kim collaborated on the patent or describe their particular roles.

Conclusion

Wook Choi’s patent describes a micro-channel-based optical sensor that measures reflected polarized light to determine an ellipsometric amplitude angle, reflecting his documented work in sensing technology at the Korea Research Institute of Standards and Science.