The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Sep. 20, 2023
Applicant:

Korea Research Institute of Standards and Science, Daejeon-si, KR;

Inventors:

Hyun Mo Cho, Daejeon-si, KR;

Dong Hyung Kim, Cheonan-si, KR;

Wook Choi, Daejeon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01B 11/0616 (2013.01);
Abstract

An elliptical amplitude sensor device including a semiconductor oxide film, a micro-channel structure including a support, a dielectric thin film formed on a substrate formed on the support, a cover unit having an incidence window and a reflection window on one side and the other side, respectively, and provided on the support, and a micro-channel formed by combination of the cover unit and the support; a sample injection unit on the dielectric thin film, an adsorption layer for the sample; a polarization generation unit which irradiates polarized incident light through the incidence window onto the adsorption layer at an incident angle θ that satisfies p-wave or s-wave anti-reflection conditions; and a polarization detection unit which separately measures the p-wave reflectance and s-wave reflectance of reflected light reflected from the adsorption layer and passing through the reflection window to detect an ellipsometric amplitude angle.


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Quick Actions:

Cho, Hyun. (2026). Apparatus and method for semiconductor oxide film ellipsometric amplitude sensor (U.S. Patent No. 12768771). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12768771

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