Company Filing History:
Years Active: 2016
Title: Wolfgang Fallot-Burghardt: Innovator in Microlithographic Illumination Systems
Introduction
Wolfgang Fallot-Burghardt is a notable inventor based in Munich, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative patent related to illumination systems.
Latest Patents
Wolfgang holds a patent for an "Illumination system for a microlithographic projection exposure apparatus." This advanced illumination system features a mirror arranged in a multi-mirror array, which can be tilted via at least one actuator. The system also includes drive electronics, comprising a coarse digital-to-analogue converter with a first resolution and a fine digital-to-analogue converter with a second, higher resolution. An adder is utilized to combine the output quantities from both converters, resulting in an overall quantity that can be applied to the actuator of the mirror.
Career Highlights
Wolfgang is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and microlithography. His work at this esteemed organization has allowed him to further develop his expertise and contribute to cutting-edge technologies.
Collaborations
Wolfgang has collaborated with talented coworkers, including Jan Horn and Christian Kempter. Their combined efforts have fostered innovation and advancement in their projects.
Conclusion
Wolfgang Fallot-Burghardt is a distinguished inventor whose work in microlithographic illumination systems has made a significant impact in the industry. His innovative patent and contributions at Carl Zeiss SMT GmbH highlight his dedication to advancing technology in this specialized field.