The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Jun. 09, 2010
Jan Horn, Munich, DE;
Christian Kempter, Wittislingen, DE;
Wolfgang Fallot-burghardt, Bad D{hacek over (u)}rkheim, DE;
Jan Horn, Munich, DE;
Christian Kempter, Wittislingen, DE;
Wolfgang Fallot-Burghardt, Bad D{hacek over (u)}rkheim, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An illumination system for a microlithographic projection exposure apparatus includes a mirror arranged in a multi-mirror array and capable of being tilted via at least one actuator. The illumination system also includes drive electronics, which include a coarse digital-to-analogue converter with a first resolution, and a fine digital-to-analogue converter with a second resolution, and an adder. The second resolution is higher than the first resolution. The adder can add output quantities that are output by the two digital-to-analogue converters to yield an overall quantity that is capable of being applied at least indirectly to the at least one actuator of the mirror.