Company Filing History:
Years Active: 1996
Title: The Innovative Mind of Wing-Lang Zang
Introduction
Wing-Lang Zang, an accomplished inventor based in Hsin-chu, Taiwan, has made significant contributions to the field of semiconductor technology. With a focus on improving metallization processes, Zang has developed a patented method that addresses crucial challenges in integrated circuit fabrication.
Latest Patents
Zang's most notable patent is titled "Post Treatment of Tungsten Etching Back." This invention introduces a new method of metallization that employs a tungsten plug while preventing the formation of unwanted precipitates. The process involves the formation of semiconductor device structures on a semiconductor substrate. By opening a contact hole through an insulating layer, a glue layer is deposited over the insulating surface and within the contact opening. After blanket depositing a layer of tungsten, the etching back process selectively leaves tungsten only within the contact opening, resulting in the formation of a tungsten plug. To mitigate the risk of impurities reacting with water or air to create precipitates, a wet chemical etch is employed for removal, and a post-treatment step using argon ion sputtering is applied to prevent future precipitate formation. This innovative method is a significant advancement in the metallization of integrated circuits, paving the way for more efficient and reliable semiconductor devices.
Career Highlights
Wing-Lang Zang is currently affiliated with Taiwan Semiconductor Manufacturing Company (TSMC), a globally recognized leader in semiconductor manufacturing. His work at TSMC has allowed him to leverage his expertise in developing cutting-edge technologies in semiconductor fabrication.
Collaborations
Zang has collaborated with esteemed colleagues such as Shu-Hui Chen and Kuei-Ying Lee. Together, they form a team dedicated to pushing the boundaries of innovation in semiconductor technologies. Their combined efforts contribute to the continuous improvement of processes that are vital in the fast-paced world of electronics.
Conclusion
Wing-Lang Zang's innovative approach and patent for the post-treatment of tungsten etching back exemplify the importance of creativity and technical skill in the semiconductor industry. By addressing inherent fabrication challenges, Zang continues to contribute to the advancement of integrated circuits, making a lasting impact on the technology sector.