This inventor holds 2 USPTO granted patents. Top assignee: Novellus Systems Incorporated. Active years: 2002-2003.
Company Filing History:
Years Active: 2002-2003
Title: Innovations by William Tom Batchelder
Introduction
William Tom Batchelder is an accomplished inventor based in Oakland, CA. He holds 2 patents that contribute significantly to the field of semiconductor fabrication. His work focuses on enhancing the efficiency and effectiveness of curing processes for semiconductor wafers.
Latest Patents
One of his notable patents is the "Inverted Hot Plate Cure Module." This innovative curing module is designed for fabricating semiconductor wafers. It features a housing with a bottom plate and a heating plate adjacent to the top surface. The design allows films on semiconductor wafers to be cured within a defined chamber by utilizing lift pins to raise the wafers to the heating plate during heating and lower them to the bottom plate during cooling.
Another significant patent is the "In-line Cure Furnace and Method for Using the Same." This system includes a pair of vertical furnace tubes with a hot plate positioned between them. The design facilitates the thermal curing of substrates, allowing for a first in/first out process as substrates transition through the system. This method enhances the efficiency of the curing process, ensuring that substrates are pre-heated and thermally cured effectively.
Career Highlights
William Tom Batchelder has made substantial contributions to the semiconductor industry through his innovative designs and patents. He is currently employed at Novellus Systems Incorporated, where he continues to develop advanced technologies for semiconductor fabrication.
Collaborations
Throughout his career, Batchelder has collaborated with notable colleagues, including Fred J. Chetcuti and Lawrence Allen Gochberg. These collaborations have further enriched his work and contributed to advancements in the field.
Conclusion
William Tom Batchelder's contributions to semiconductor technology through his patents demonstrate his innovative spirit and commitment to advancing the industry. His work continues to influence the methods used in semiconductor fabrication today.