William T Lee

Title: Innovations of William T Lee

Introduction

William T Lee is an accomplished inventor based in Pleasanton, CA. He has made significant contributions to the field of substrate processing systems. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of substrate handling.

Latest Patents

William T Lee holds a patent for a Modular Substrate Processing System. This invention provides an apparatus and method for performing a process on a substrate. It utilizes at least two types of structures to create a flow path for the substrate, allowing it to be moved from one processing or loading position to another. The first structure is a conveyor, while the second is a track. The flow path may be designed as a closed continuous loop. Each processing island is equipped with a valve for the introduction and extraction of the substrate into and out of the interior of the island. The processing island may also include load locks and can be integrated with various chambers such as inspection stations, CVD chambers, PECVD chambers, PVD chambers, post-anneal chambers, cleaning chambers, descumming chambers, and etch chambers.

Career Highlights

William T Lee is currently employed at Applied Komatsu Technology, Inc. His work focuses on advancing substrate processing technologies. He has demonstrated a commitment to innovation and excellence throughout his career.

Collaborations

William has collaborated with notable colleagues, including John M White and Robert B Conner. Their combined expertise has contributed to the success of various projects within the company.

Conclusion

William T Lee's contributions to substrate processing technology exemplify his innovative spirit and dedication to advancing the field. His patent for the Modular Substrate Processing System showcases his ability to create efficient solutions for complex challenges.