William M Hale

Title: The Innovative Contributions of William M Hale

William M Hale is a notable inventor based in N. Scituate, MA (US). He has made significant contributions to the field of technology, particularly in the area of sputtering sources. His work has implications for various applications, including materials science and engineering.

Introduction

William M Hale is recognized for his innovative approach to developing a conical magnetron sputter source. This invention is crucial for enhancing the efficiency and effectiveness of sputtering processes. His patent reflects a deep understanding of the principles of magnetism and material deposition.

Latest Patents

Hale holds a patent for a conical magnetron sputter source. The sputtering source comprises a means for providing DC or RF power and cooling to a conical target electrode with magnets surrounding it and an anode positioned at the bottom. The design includes a grounded anode at the center of the sputtering source. A plurality of magnets, forming rings, are strategically located behind the conical target electrode to direct magnetic field lines toward the anode. The conical target electrode features an inner surface that is slightly inclined from the centerline, ensuring optimal performance. A ground shield is placed around and above the magnets and the conical electrode, which helps eliminate high-energy ions from reaching the substrate. An opening in the shield allows low-energy particles of the target material to exit, facilitating a narrow beam of target material for deposition on a substrate located at a distance from the source.

Career Highlights

William M Hale is associated with the United States of America as represented by the Secretary of the Air Force. His work in this capacity has allowed him to contribute to advancements in technology that support national interests. His innovative spirit and technical expertise have made him a valuable asset in his field.

Collaborations

Hale has collaborated with Alvin J Drehman, further enhancing the scope and impact of his work. Their partnership exemplifies the importance of teamwork in driving innovation and achieving significant technological advancements.

Conclusion

William M Hale's contributions to the field of sputtering technology through his patented conical magnetron sputter source demonstrate his innovative capabilities. His work continues to influence advancements in material deposition techniques, showcasing the importance of inventors in shaping the future of technology.