Company Filing History:
2 out of 22 
1 out of 1,484 
1 out of 1,258 Years Active: 1994-2001
Title: The Innovative Contributions of William G McKinley
Introduction
William G McKinley, an accomplished inventor based in Littleton, MA, holds a remarkable portfolio of four patents. His innovations primarily focus on advancements in photolithography systems, which are crucial in the semiconductor and display manufacturing sectors.
Latest Patents
Among his notable inventions, McKinley developed a "Lithography System and Method with Mask Image Enlargement." This sophisticated photolithography system features a specialized light source and illumination optics that project illumination light onto a mask. Notably, the system can achieve feature sizes of less than 10 micrometers, ideally 3 micrometers, while enlarging the mask image for the production of large wafers or panels in a single exposure.
Additionally, he invented a "Mounting Member Method and Apparatus with Variable Length Supports." This invention involves a deformable substrate chuck supported by a series of individually controllable actuators. These actuators can adjust the height of the mounting plate to hold substrates, such as semiconductor wafers or flat panel displays, firmly in place. An optical sensing system further enhances the precision by monitoring the substrate shape and adjusting the actuators accordingly.
Career Highlights
William G McKinley's career includes significant tenures at notable companies in the optics and aerospace sectors. He contributed his expertise at Hughes Danbury Optical Systems, Inc. and The B. F. Goodrich Company, helping to pioneer advancements in optical systems and technologies.
Collaborations
Throughout his career, McKinley has worked alongside talented individuals such as Gerard M Perron and Berge Tatian. These collaborations have fostered an environment of innovation, leading to the development of groundbreaking technologies that have propelled advancements in the industry.
Conclusion
William G McKinley's contributions to the field of photolithography are both innovative and impactful. His patents reflect a deep understanding of technology and materials, facilitating the production of advanced semiconductor devices and display systems. As the industry evolves, McKinley's work continues to play a vital role in shaping the future of manufacturing technologies.
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