William E Willenbrock, Jr

Title: The Innovations of William E Willenbrock, Jr.

Introduction

William E Willenbrock, Jr. is a notable inventor based in Manchester, NJ (US). He has made significant contributions to the field of VLSI (Very Large Scale Integration) devices. With a total of 2 patents, his work has had a lasting impact on semiconductor technology.

Latest Patents

One of his latest patents is titled "Plasma pretreatment with BCl.sub.3 to remove passivation formed by." This invention facilitates the manufacture of VLSI devices by providing a method for chlorine reactive sputter etching of silicon materials in a plasma reactor that has been passivated by a previous etching operation involving a fluorine-containing gas. The passivated reactor is reactivated for chlorine reactive sputter etching by generating a boron trichloride plasma in the reactor. In the preferred embodiment, a mixture of boron trichloride and chlorine is used to initiate the etching of the silicon material before pure chlorine is used to complete the etch. This invention allows for the etching of silicon materials in a reactor where chlorine and fluorine-containing gases are used sequentially.

Another significant patent is the "Method for patterning films using reactive ion etching thereof." This invention addresses the patterning of an organic layer on a VLSI wafer through reactive oxygen (or other) ion anisotropic etching. It effectively removes build-ups of oxides (or other compounds) on the sidewalls of apertures formed in the organic layer before etching the material, typically aluminum, of the VLSI wafer located at the bottom of these apertures, using the patterned organic layer as an etch mask.

Career Highlights

William E Willenbrock, Jr. has had a distinguished career at Bell Telephone Laboratories. His work has been instrumental in advancing the technology used in semiconductor manufacturing. His innovative approaches have contributed to the efficiency and effectiveness of VLSI device production.

Collaborations

Throughout his career, William has collaborated with notable colleagues, including Eliezer Kinsbron and Hyman J Levinstein. These collaborations have further enriched his contributions to the field of semiconductor technology.

Conclusion

William E Willenbrock, Jr. is a prominent inventor whose work has significantly influenced the VLSI device