Location History:
- Los Altos, CA (US) (1982)
- San Jose, NY (US) (1990)
- San Jose, CA (US) (1991 - 2018)
Company Filing History:
Years Active: 1982-2018
Title: The Innovations of William Daniel Meisburger
Introduction
William Daniel Meisburger is a notable inventor based in San Jose, California. He holds a total of nine patents, showcasing his significant contributions to the field of imaging technology and optical lithography. His work has had a profound impact on the way substrates are inspected and processed in various industries.
Latest Patents
Among his latest patents is an imaging apparatus that features a plurality of movable beam columns. This innovative apparatus is designed for inspecting a substrate, which includes an X-Y stage that supports the substrate and allows for movement in both X and Y directions. The imaging system utilizes multiple beam columns that irradiate different regions of the substrate with discrete beams of energy. This design enhances the efficiency and accuracy of substrate inspection.
Another significant patent involves a method of operation for a spatial light modulator (SLM)-based optical lithography tool. This optical lithography system comprises a light source, a spatial light modulator, and imaging optics. The system continuously moves a photosensitive substrate relative to the spatial light modulator, allowing for the projection of a constantly moving image on the substrate. This method enables the formation of a latent image on the substrate surface with sub-pixel resolution feature edge placement.
Career Highlights
William Daniel Meisburger has worked with several prominent companies throughout his career, including Maskless Lithography, Inc. and International Business Machines Corporation (IBM). His experience in these organizations has contributed to his expertise in imaging technology and optical systems.
Collaborations
Some of his notable coworkers include Steven D. Golladay and Fritz J. Hohn. Their collaborations have likely played a role in advancing the technologies and methodologies that Meisburger has developed.
Conclusion
William Daniel Meisburger's contributions to imaging technology and optical lithography are significant, as evidenced by his numerous patents and career achievements. His innovative approaches continue to influence the industry and pave the way for future advancements.