William A Frutiger

Title: The Innovative Mind of William A. Frutiger

Introduction

William A. Frutiger, an accomplished inventor based in Beverly, MA, has made significant contributions to the field of semiconductor technology. With a patent portfolio comprising six inventive patents, Frutiger's work particularly focuses on the electrostatic clamping of semiconductor wafers, a critical aspect in the processing of integrated circuits. His innovations have laid the groundwork for advancements in semiconductor manufacturing processes.

Latest Patents

Among Frutiger's latest inventions is the "Electrostatic Wafer Clamp," an apparatus designed for the electrostatic clamping of semiconductor wafers in a vacuum processing chamber. This invention employs an ion beam applied to the wafer, enhancing its processing capabilities. The first embodiment of the apparatus consists of an electrically conductive platen, a resilient, thermally-conductive dielectric layer affixed to the platen, and conductive wires positioned on the clamping surface. By applying a clamping voltage between the wires and the platen, the apparatus ensures a firm grip on the wafer while depressing the wires into the resilient dielectric layer.

In its second embodiment, the invention features a three-phase wafer clamping apparatus that includes a platen divided into three electrically isolated sections, with each connected to a phase of a three-phase clamping voltage. This setup minimizes the wafer charging current and maintains a constant clamping force. Frutiger's innovative approach extends to a third embodiment, a six-phase wafer clamping apparatus that consists of a platen equipped with six symmetrically located electrodes. Here, voltages of six different phases are applied, enhancing the performance of the clamping apparatus through the use of bipolar square wave voltages.

Career Highlights

Frutiger has had a distinguished career, contributing his expertise to prominent companies such as Energy Sciences Inc. and Sony Corporation. His work in these organizations has allowed him to explore the frontiers of semiconductor technology and further his understanding of innovative manufacturing techniques.

Collaborations

Throughout his professional journey, Frutiger has collaborated with notable peers, including Kenneth E. Williams and A. Stuart Denholm. These partnerships have enriched his work, fostering an environment of shared knowledge and collective advancement in technology.

Conclusion

William A. Frutiger stands out as a pioneering inventor whose contributions have significantly impacted the semiconductor industry. His innovative electrostatic wafer clamping technologies represent a leap forward in manufacturing processes, enhancing both efficiency and reliability. As Frutiger continues to innovate, his work inspires future generations of inventors in the pursuit of groundbreaking technologies.