This inventor holds 2 USPTO granted patents. Top assignee: Kla Corporation. Active years: 2022.
Company Filing History:
Years Active: 2022
Title: Will Schumaker: Innovator in Laser Produced Plasma Technology
Introduction
Will Schumaker is a prominent inventor based in Capitola, California. He has made significant contributions to the field of laser produced plasma technology, holding 2 patents that focus on innovative methods for generating X-ray illumination.
Latest Patents
Schumaker's latest patents include groundbreaking technologies. The first patent, titled "Laser produced plasma illuminator with low atomic number cryogenic target," presents methods and systems for generating X-ray illumination from a laser produced plasma (LPP) using a low atomic number, cryogenic target. This invention involves directing a highly focused, short duration laser pulse to a cryogenically frozen target, igniting a plasma. The target material may include elements with an atomic number less than 19, and the system is designed to generate multiple line or broadband X-ray illumination in the soft X-ray (SXR) spectral range, which is essential for measuring the structural and material characteristics of semiconductor structures.
The second patent, "Laser produced plasma illuminator with liquid sheet jet target," describes methods for generating X-ray illumination from an LPP employing a liquid sheet jet target. In this system, a focused laser pulse interacts with a liquid sheet jet target, igniting a plasma. The liquid sheet jet can be generated by various nozzle designs, and the resulting LPP light source also generates multiple line or broadband X-ray illumination in the SXR spectral range.
Career Highlights
Will Schumaker is currently associated with Kla Corporation, where he continues to develop innovative technologies in the field of laser produced plasma. His work has significantly advanced the understanding and application of X-ray illumination in semiconductor research.
Collaborations
Some of Schumaker's notable coworkers include Jongjin Kim and Michael Friedmann, who collaborate with him on various projects related to laser produced plasma technology.
Conclusion
Will Schumaker is a key figure in the advancement of laser produced plasma technology, with his patents paving the way for new applications in semiconductor research. His contributions continue to influence the field and inspire future innovations.