Location History:
- Ichon, KR (2004)
- Ichon-shi, KR (2004 - 2005)
Company Filing History:
Years Active: 2004-2005
Title: Weon-Joon Suh: Innovator in Semiconductor Technology
Introduction
Weon-Joon Suh is a prominent inventor based in Ichon-shi, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on advanced photolithography techniques that enhance the manufacturing processes of semiconductor devices.
Latest Patents
One of his latest patents is a method for forming a pattern using argon fluoride photolithography. This innovative approach allows for the formation of a photoresist pattern with minimal transformations. The process includes several steps, such as forming an organic anti-reflective coating layer on an etch-target layer, coating a photoresist for ArF on the coating layer, and exposing the photoresist with an ArF laser. The method also involves developing the photoresist to reveal portions of the organic anti-reflective coating layer and etching the layer using the first photoresist pattern as a mask.
Another notable patent by Weon-Joon Suh is a method for manufacturing semiconductor memory devices using a photoresist pattern exposed with an ArF laser beam. This method includes forming a mask layer on a target layer, coating a photoresist on the mask layer, and exposing the photoresist with a light resource of specific wavelengths. The process culminates in selectively etching the target layer using the mask pattern as an etching mask.
Career Highlights
Weon-Joon Suh is currently employed at Hynix Semiconductor Inc., where he continues to innovate in the semiconductor industry. His expertise in photolithography and semiconductor manufacturing processes has positioned him as a key player in the field.
Collaborations
Throughout his career, Weon-Joon Suh has collaborated with notable colleagues, including Sung-Kwon Lee and Sang-Ik Kim. These collaborations have further enhanced his contributions to semiconductor technology.
Conclusion
Weon-Joon Suh's work in semiconductor technology, particularly in photolithography, showcases his innovative spirit and dedication to advancing the industry. His patents reflect a commitment to improving manufacturing processes, making him a significant figure in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.