Company Filing History:
Years Active: 2024
Title: Weng Shen Su: Innovator in Pressure Sensor Technology
Introduction
Weng Shen Su is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of sensor technology, particularly in the development of high-stability pressure sensors. With a total of 2 patents to his name, Su's work exemplifies innovation and technical expertise.
Latest Patents
Weng Shen Su's latest patents focus on advanced pressure sensor designs. One of his patents describes a method that includes depositing a passivation layer on a substrate, followed by the deposition and patterning of a first polysilicon layer. This process continues with the deposition and patterning of a first oxide layer, which forms a patterned first oxide layer. The method further involves the deposition and patterning of a second polysilicon layer that directly contacts the first polysilicon layer. The design incorporates a bottom electrode and a second oxide layer, which is etched to create a sensing cavity. A top electrode is then positioned over the bottom electrode within another substrate.
Another patent by Su details a pressure sensor that comprises a polysilicon sensing membrane. This sensor includes one or more polysilicon electrodes situated over a silicon substrate. The design features polysilicon routing layers that electrically connect the electrodes. The polysilicon sensing membrane deforms in response to stimuli, altering the capacitance between the membrane and the electrodes. Additionally, the sensor includes vacuum cavities positioned between the sensing membrane and the electrodes, enhancing its functionality.
Career Highlights
Weng Shen Su is currently employed at InvenSense, Inc., where he continues to innovate in the field of sensor technology. His work has been instrumental in advancing the capabilities of pressure sensors, making them more reliable and efficient.
Collaborations
Su has collaborated with notable colleagues, including Chung-Hsien Lin and Tsung Lin Tang. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
Weng Shen Su is a prominent figure in the realm of pressure sensor innovation. His patents reflect a deep understanding of sensor technology and a commitment to advancing the field. Through his work at InvenSense, Inc., he continues to push the boundaries of what is possible in sensor design.