Weng-Hung Tseng

Title: Weng-Hung Tseng: Innovator in FinFET Technology

Introduction

Weng-Hung Tseng is a prominent inventor based in Yilan County, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of fin-like field-effect transistors (FinFETs). With a total of 2 patents to his name, Tseng's work is pivotal in advancing modern electronics.

Latest Patents

Tseng's latest patents focus on innovative methods for fabricating FinFET devices. The first patent describes a method that includes forming mandrel features over a substrate and performing a coarse cut to create a coarse space. This method allows for the etching of the substrate using the mandrel features, leading to the formation of fins. The process also involves depositing a spacer layer to fill the space between adjacent fins and etching it to create sidewall spacers. The second patent outlines a similar approach, detailing the steps of forming mandrel features, performing cuts to create spaces, and etching the substrate to form fins. Both patents emphasize the importance of precision in the fabrication process, which is crucial for the performance of FinFET devices.

Career Highlights

Weng-Hung Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at TSMC has positioned him as a key player in the development of advanced semiconductor technologies. Tseng's expertise in FinFET fabrication methods has contributed to the company's reputation for innovation and excellence in the field.

Collaborations

Throughout his career, Tseng has collaborated with notable colleagues, including Ming-Feng Shieh and Tzung-Hua Lin. These collaborations have fostered a productive environment for innovation and have led to significant advancements in semiconductor technology.

Conclusion

Weng-Hung Tseng's contributions to FinFET technology and his innovative patents highlight his role as a leading inventor in the semiconductor industry. His work continues to influence the development of advanced electronic devices, ensuring that he remains a significant figure in the field.