This inventor holds 3 USPTO granted patents and 2 published patent applications. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2023-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
2 out of 42,872 
1 out of 481 Years Active: 2023-2026
Title: Innovations of Wen-Wei Fan in Radio Frequency Power Management
Introduction
Wen-Wei Fan is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of radio frequency (RF) power management, particularly in processes involving plasma technology. With a total of 3 patents to his name, his work is recognized for its innovative approach to enhancing RF processes.
Latest Patents
One of Wen-Wei Fan's latest patents focuses on in-situ closed-loop management of radio frequency power generators. This patent addresses the need for effective RF power management during various RF processes, including plasma etching, chemical vapor deposition, and physical vapor deposition. The invention features an RF power measurement device that incorporates a coil-shaped current sensor. This sensor is strategically placed along the path between an RF generator and a processing chamber. It measures the current flowing through this path, allowing for the calibration of the RF generator without the need for disassembly. This innovation facilitates real-time management of RF power, ensuring optimal performance during critical processes.
Career Highlights
Wen-Wei Fan is currently associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this esteemed organization has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing technologies.
Collaborations
Wen-Wei Fan collaborates with several professionals in his field, including his coworker Wei Ting Liu. Their combined expertise enhances the development of innovative solutions in RF power management.
Conclusion
Wen-Wei Fan's contributions to the field of radio frequency power management exemplify the impact of innovation in technology. His patents reflect a commitment to improving efficiency and effectiveness in semiconductor processes. Through his work, he continues to influence advancements in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile