This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Innovations by Wen Jan Lin in Semiconductor Fabrication
Introduction
Wen Jan Lin is a notable inventor based in Chiunglin, Taiwan. He has made significant contributions to the field of semiconductor fabrication, particularly in the development of advanced processes for MOSFET devices. His innovative work has led to the granting of a patent that enhances the efficiency and reliability of polycide structures.
Latest Patents
Wen Jan Lin holds a patent for a "Two step thermal treatment procedure applied to polycide structures." This process is designed for fabricating a polycide SAC structure for MOSFET devices. The patent outlines a method that utilizes tungsten silicide on in situ doped polysilicon, employing tungsten hexafluoride and dichlorosilane as reactants for the deposition of tungsten silicide. The process includes a first thermal anneal treatment prior to polycide patterning, which protects the exposed tungsten silicide sides during the patterning procedure. A second thermal anneal treatment is performed after polycide patterning and before silicon oxide deposition, providing protection to the exposed top surface of tungsten silicide during the deposition process.
Career Highlights
Wen Jan Lin is currently associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this prestigious company has allowed him to contribute to cutting-edge technologies that drive advancements in electronic devices.
Collaborations
Wen Jan Lin has collaborated with esteemed colleagues such as Chi-Di An and Hung-Che Liao. These partnerships have fostered an environment of innovation and have led to the successful development of new technologies in semiconductor fabrication.
Conclusion
Wen Jan Lin's contributions to the field of semiconductor fabrication, particularly through his patented processes, highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations in electronic device manufacturing.