Wen-Hwo Liu

Title: **Wen-Hwo Liu: Innovator in Semiconductor Technology**

Introduction

Wen-Hwo Liu, based in Taipei, Taiwan, is a notable inventor recognized for his contributions to semiconductor technology. He holds a patent that highlights his innovative approach towards improving processes in the fabrication of semiconductor devices. His work underscores the critical interplay between chemistry and engineering in contemporary technology.

Latest Patents

Wen-Hwo Liu is credited with one patent titled "Distribution manifold for exhausting photoresist vapors." This patent describes an exhaust apparatus designed for effectively evacuating vapor during the baking of liquid chemicals deposited on substrates. The apparatus features a heating chamber along with a hot plate that horizontally supports and heats the substrate. Notably, a cover plate is suspended over the hot plate and is equipped with multiple exhaust ports that facilitate vapor extraction. These exhaust ports are complemented by a manifold and adjustable dampers, which enhance the control over the vapor being exhausted. This design is pivotal for mitigating environmental contamination during semiconductor manufacturing.

Career Highlights

Liu's professional journey is marked by his role at Taiwan Semiconductor Manufacturing Company Limited (TSMC), where he has made significant strides in enhancing semiconductor manufacturing processes. His patent serves as a testament to his technical expertise and commitment to innovation within the semiconductor industry.

Collaborations

Wen-Hwo Liu has collaborated with esteemed colleagues, including Yao-Hwan Kao and Hsun-Peng Lin. Working together, they drive advancements in semiconductor technologies, contributing to Taiwan's position as a leader in global electronics manufacturing.

Conclusion

Wen-Hwo Liu's inventive spirit exemplifies the vital role of innovators in advancing semiconductor technology. His patent for a distribution manifold not only showcases his technical acumen but also highlights the importance of innovation in meeting the challenges of modern manufacturing. As a key player in TSMC, Liu continues to influence the future of semiconductor fabrication, ensuring that the industry remains at the forefront of technological advancement.