Wei-Yuan Chen

Title: Wei-Yuan Chen: Innovator in Lithography Technology

Introduction

Wei-Yuan Chen is a prominent inventor based in Hsinchu County, Taiwan. He has made significant contributions to the field of lithography, holding three patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of Wei-Yuan Chen's latest patents is a lithography system and method that includes a table body, a wafer stage, a first sliding member, a second sliding member, a first cable, a first bracket, a rail guide, and a first protective film. The first sliding member is coupled to the wafer stage, while the second sliding member is attached to an edge of the table body. The first sliding member is designed to move along a track of the second sliding member. The first bracket secures the first cable and is connected to a roller structure, which consists of a body and a wheel. The rail guide confines the movement of the wheel, and the first protective film is adhered to the surface of the rail guide, allowing the roller structure to move smoothly along it.

Career Highlights

Wei-Yuan Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading organization in the semiconductor industry. His work focuses on advancing lithography technologies that are crucial for the production of integrated circuits.

Collaborations

Throughout his career, Wei-Yuan Chen has collaborated with notable colleagues, including Shao-Hua Wang and Chueh-Chi Kuo. These partnerships have contributed to the development of innovative solutions in the field of lithography.

Conclusion

Wei-Yuan Chen's contributions to lithography technology reflect his dedication to innovation and excellence. His patents and collaborations highlight his role as a key figure in advancing semiconductor manufacturing processes.