This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2007.
Company Filing History:
Years Active: 2007
Title: Innovations by Wei Cheng Hsien in Etching Operation Management
Introduction
Wei Cheng Hsien is a notable inventor based in Nantou, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in etching operation management systems. His innovative approach has led to the development of a patented technology that enhances the efficiency and accuracy of etching processes.
Latest Patents
Wei Cheng Hsien holds a patent for "Etching operation management systems and methods." This patent describes a sophisticated process controller that acquires line width measurements on processed wafers. The system determines a first Critical Dimension (CD) bias by subtracting the measured width from a target width. It then calculates an adjusted target width by providing both a first and a second etching duration. The process continues by determining a second CD bias based on the adjusted target width and calculating a third etching duration corresponding to the second CD bias. The system receives events from an etching tool and directs the tool to perform etching operations on an initiated wafer for the calculated third etching duration.
Career Highlights
Wei Cheng Hsien is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on improving etching processes, which are critical for the production of high-quality semiconductor devices. His innovative solutions have contributed to the company's reputation for excellence in manufacturing.
Collaborations
Wei Cheng Hsien collaborates with his coworker, Yen-Pu Hsu, to further enhance the development of etching technologies. Their combined expertise in semiconductor manufacturing has led to advancements that benefit the industry as a whole.
Conclusion
Wei Cheng Hsien's contributions to etching operation management systems exemplify the importance of innovation in the semiconductor industry. His patented technology not only improves operational efficiency but also sets a standard for future developments in the field.