Company Filing History:
Years Active: 2017
Title: Wataru Kume: Innovator in Plasma Processing Technology
Introduction
Wataru Kume is a notable inventor based in Beaverton, Oregon, specializing in plasma processing technology. He has made significant contributions to the field through his innovative patent, which addresses the complexities of etching multilayered materials.
Latest Patents
Kume holds a patent for a plasma processing method and apparatus designed for etching multilayered materials. This method involves a processing chamber where a processing space is formed, along with a gas supply unit that introduces a processing gas into the space. The patent outlines a first etching process that etches the first magnetic layer using a first processing gas to generate plasma, halting the process at the insulating layer's surface. A second etching process follows, which removes any residue by utilizing a second processing gas and generating plasma. The materials involved in this process include CoFeB, with the first processing gas containing chlorine and the second processing gas containing hydrogen. Kume's innovative approach enhances the efficiency and effectiveness of plasma processing in various applications.
Career Highlights
Wataru Kume is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on advancing plasma processing techniques, contributing to the development of cutting-edge technologies in the field.
Collaborations
Kume collaborates with talented professionals in his field, including colleagues Takashi Sone and Daisuke Urayama. Their combined expertise fosters innovation and drives advancements in plasma processing technology.
Conclusion
Wataru Kume's contributions to plasma processing technology through his patent and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative methods continue to shape the future of material processing in the semiconductor industry.