Company Filing History:
Years Active: 2009-2012
Title: Wataru Itou: Innovator in Silicon Wafer Technology
Introduction
Wataru Itou is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of silicon wafer technology, holding a total of 2 patents. His work focuses on improving the quality and evaluation methods of silicon wafers, which are essential components in the semiconductor industry.
Latest Patents
Wataru Itou's latest patents include innovative methods for producing silicon wafers. One of his patents describes a method that allows for the creation of silicon wafers that are free of crystal-originated pits (COPs) and dislocation clusters. This method involves growing a single crystal silicon ingot using the Czochralski method, cutting the ingot into wafers, and subjecting them to rapid thermal processing (RTP) in an oxidizing atmosphere. This process effectively reduces defects that may not be visible in the as-grown state.
Another notable patent is a silicon wafer surface defect evaluation method. This method enables the detection of small crystal defects on the wafer surface. It involves a rapid heat treatment process that elevates the temperature of the silicon wafer quickly, followed by cooling. The method utilizes a surface photo voltage technique to calculate the minority carrier diffusion length, allowing for the identification of regions with small COPs that are typically undetectable by standard particle counters.
Career Highlights
Wataru Itou is currently employed at Sumco Corporation, a leading company in the semiconductor industry. His work at Sumco has allowed him to focus on advancing silicon wafer technology, contributing to the company's reputation for high-quality products. His innovative approaches have positioned him as a key figure in the field.
Collaborations
Wataru Itou collaborates with talented colleagues, including Takeshi Hasegawa and Takaaki Shiota. Together, they work on various projects aimed at enhancing silicon wafer production and evaluation methods.
Conclusion
Wataru Itou's contributions to silicon wafer technology are noteworthy, with his patents reflecting a commitment to innovation and quality. His work continues to impact the semiconductor industry positively, showcasing the importance of advancements in this critical field.