This inventor holds 1 USPTO granted patent. Top assignee: Axcelis Technologies, Inc.. Active years: 2010.
Company Filing History:
Years Active: 2010
Title: Walter Class: Innovator in Ion Beam Measurement Technology
Introduction
Walter Class is an accomplished inventor based in West Newbury, MA (US). He has made significant contributions to the field of ion implantation technology. His innovative work focuses on enhancing the precision of ion beam measurements, which is crucial for various applications in semiconductor manufacturing.
Latest Patents
Walter Class holds a patent for "Structures and methods for measuring beam angle in an ion implanter." This invention involves an ion beam angular measurement apparatus designed to provide feedback for a predetermined set ion beam angle. The apparatus comprises an arrangement of composite pillars formed on an insulating material. These composite pillars selectively allow ion beams to penetrate a first layer of a pillar. Resistivity measurements are taken for each of the composite pillars before and after test ion beam implantation. The resistivity measurements yield information relating to the angle of the ion beam during testing.
Career Highlights
Walter Class is associated with Axcelis Technologies, Inc., a company known for its advanced ion implantation equipment. His work at Axcelis has positioned him as a key player in the development of innovative solutions for the semiconductor industry. With a focus on precision and efficiency, Walter's contributions have helped improve the performance of ion implanters.
Collaborations
Walter has collaborated with notable colleagues, including Leonard Michael Rubin and Ivan Berry. Their combined expertise has fostered advancements in ion beam technology and has contributed to the success of their projects.
Conclusion
Walter Class is a prominent inventor whose work in ion beam measurement technology has made a significant impact on the semiconductor industry. His innovative patent and collaboration with esteemed colleagues highlight his dedication to advancing technology in this field.
