Location History:
- Berkeley, CA (US) (2001 - 2003)
- Rossdorf, DE (2004)
Company Filing History:
Years Active: 2001-2004
Title: Volker Boegli: Innovator in Photolithographic Techniques
Introduction
Volker Boegli is a notable inventor based in Rossdorf, Germany. He has made significant contributions to the field of photolithography, holding a total of 3 patents. His work focuses on advanced techniques that enhance the precision and efficiency of lithographic systems.
Latest Patents
One of Boegli's latest patents is a technique for writing with a raster scanned beam. This innovation involves generating patterns in a photolithographic system using a multiple blank position flash cycle. The method allows a beam to create a shadow of a first aperture that moves along a designated direction to a flash position, where it interacts with a second aperture. This process enables the beam to impinge upon two different blank positions during a single flash cycle.
Another significant patent is a method and apparatus that determines charged particle beam shape codes. This invention represents a substrate surface as gray level values and constructs shape data that specifies the shape and position of a flash field. The apparatus processes patterns in vector format and modifies matrices to determine intermediate shape data, ultimately facilitating precise lithographic applications.
Career Highlights
Throughout his career, Volker Boegli has worked with prominent companies in the industry, including Applied Materials, Inc. and Etec Systems, Inc. His experience in these organizations has contributed to his expertise in photolithographic technologies.
Collaborations
Boegli has collaborated with notable professionals in the field, including Stephen A. Rishton and Lee H. Veneklasen. These collaborations have further enriched his work and innovations in lithography.
Conclusion
Volker Boegli's contributions to photolithography through his innovative patents and collaborations highlight his role as a key figure in advancing this technology. His work continues to influence the industry and pave the way for future developments.