Vinod K Dham

Title: Vinod K Dham: Innovator in Nonvolatile Memory Technology

Introduction

Vinod K Dham is a prominent inventor known for his contributions to the field of semiconductor technology. He is based in Fremont, California, and has been instrumental in developing innovative processes for nonvolatile memory devices. With a total of two patents to his name, Dham's work has significantly impacted the electronics industry.

Latest Patents

Dham's latest patents include a mixed dielectric process and a nonvolatile memory device fabricated thereby. This process involves fabricating volatile and nonvolatile field effect devices on a common semiconductor wafer. A unique feature of this process is the elimination of nitride from beneath any poly I layers while selectively retaining sandwiched and coextensive segments of nitride and poly II layers for the memory devices. The method begins with a wafer treated according to the general localized oxidation of silicon process, followed by a blanket enhancement implant and selectively masked depletion implants. The subsequent steps include a contact etch, deposition of a poly I layer, and a patterned etch of the poly I layer. The process enhances the reliability of the complete integrated circuit (IC) by ensuring that no nitride remains under any poly I layer.

Another significant patent is the method for making low leakage polycrystalline silicon-to-substrate. This process allows for the creation of buried contacts without damaging the surface of the silicon substrate while etching the pattern of a poly interconnect layer. The presence of the gate oxide layer prevents damage to the substrate surface during the etching process. An ion implantation step forms a parasitic depletion mode channel, which allows for effective coupling between the poly interconnect layer and the diffused region in the substrate.

Career Highlights

Vinod K Dham has had a distinguished career, working at Ncr Corporation, where he has applied his expertise in semiconductor technology. His innovative approaches have led to advancements in memory device fabrication, making significant contributions to the field.

Collaborations

Dham has collaborated with notable colleagues, including Edward H Honnigford and John K Stewart, Jr. Their combined efforts have furthered research and development in semiconductor technologies.

Conclusion

Vinod K Dham's work in the field of nonvolatile memory technology showcases his innovative spirit and dedication to advancing semiconductor processes. His patents reflect a deep understanding of the complexities involved in memory device fabrication, contributing to