Location History:
- Santa Clara, CA (US) (1999 - 2000)
- Fremont, CA (US) (2000)
Company Filing History:
Years Active: 1999-2025
Title: Vikram Singh: Innovator in Plasma Processing Technologies
Introduction
Vikram Singh is a notable inventor based in Santa Clara, California. He has made significant contributions to the field of plasma processing technologies, holding a total of four patents. His work focuses on enhancing the efficiency and uniformity of substrate processing.
Latest Patents
Vikram Singh's latest patents include innovative systems and methods for multi-level pulsing in RF plasma tools. These systems facilitate the generation of four or more states, allowing for finer control in processing substrates. The RF generator produces an RF signal with multiple power levels corresponding to these states. Another significant patent involves a method and apparatus for improving etch and deposition uniformity in plasma processing systems. This technology enhances the processing of substrates through chemical vapor deposition or etching, utilizing a plasma processing chamber and a substrate support system.
Career Highlights
Vikram Singh is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing plasma processing technologies.
Collaborations
Some of Vikram Singh's coworkers include Changhun Lee and Yun-Yen Jack Yang, who collaborate with him on various projects within the company.
Conclusion
Vikram Singh's contributions to plasma processing technologies through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the field. His innovations continue to shape the future of substrate processing.