The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Apr. 23, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Ying Wu, Livermore, CA (US);
Maolin Long, Santa Clara, CA (US);
John Drewery, San Jose, CA (US);
Vikram Singh, Santa Clara, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2005.12); H03K 3/017 (2005.12);
U.S. Cl.
CPC ...
H01J 37/32183 (2012.12); H01J 37/32146 (2012.12); H01J 37/32174 (2012.12); H03K 3/017 (2012.12);
Abstract
Systems and methods for multi-level pulsing are described. The systems and methods include generating four or more states. During each of the four or more states, a radio frequency (RF) generator generates an RF signal. The RF signal has four or more power levels, and each of the four or more power levels corresponds to the four or more states. The multi-level pulsing facilitates a finer control in processing a substrate.