Company Filing History:
Years Active: 2005-2011
Title: The Innovative Contributions of Vijay Bhaskaran
Introduction
Vijay Bhaskaran is a notable inventor based in Beaverton, OR (US). He has made significant contributions to the field of electroplating, particularly in the development of techniques that enhance the quality and efficiency of metal deposition in microscopic features. With a total of 2 patents to his name, Bhaskaran's work is recognized for its innovative approaches to solving complex engineering challenges.
Latest Patents
Vijay Bhaskaran's latest patents focus on processes for electroplating metals into microscopic recessed features. Several techniques are described for reducing or mitigating the formation of seams and/or voids during the electroplating of these intricate structures. One of the key methods involves the use of cathodic polarization to counteract the negative effects of introducing a substrate that has been plated with a seed layer into an electroplating solution. Additionally, diffusion-controlled electroplating techniques are outlined to facilitate bottom-up filling of trenches and vias, thereby preventing the sidewalls from merging and creating seams or voids. A preliminary plating step is also included, which involves applying a thin film of conductor on the interior surfaces of features. This step ensures adequate electrical conductivity to the bottom of the features, thus promoting effective bottom-up filling.
Career Highlights
Vijay Bhaskaran is currently employed at Novellus Systems Incorporated, where he continues to push the boundaries of electroplating technology. His work has not only advanced the field but has also contributed to the development of more reliable and efficient manufacturing processes in the semiconductor industry.
Collaborations
Throughout his career, Bhaskaran has collaborated with several talented individuals, including Steven T Mayer and Evan E Patton. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Vijay Bhaskaran's contributions to the field of electroplating are significant and impactful. His innovative patents and collaborative efforts highlight his dedication to advancing technology in the semiconductor industry. His work continues to inspire future innovations in the field.