Vijai Kumar N Chhagan

Title: Vijai Kumar N Chhagan: Innovator in Semiconductor Technology

Introduction

Vijai Kumar N Chhagan is a notable inventor based in Belgrave, GB. He has made significant contributions to the field of semiconductor technology, particularly through his innovative designs that enhance the performance of integrated circuits. His work has been recognized for its impact on the efficiency and reliability of semiconductor manufacturing processes.

Latest Patents

Vijai Kumar N Chhagan holds a patent for a novel design known as the LOCOS mask for suppression of narrow space field oxide thinning and oxide punch through effect. This innovative oxidation mask improves control of the birds beak phenomenon and tailors the field oxide isolation profile in the vicinity of the birds beak. The design is particularly beneficial for narrow field isolation spacings found in sub half-micron integrated circuit technology. The mask incorporates a thin tapered silicon nitride foot along its lower edge, allowing for nominal expansion of the oxide during the early stages of oxidation. This feature permits in-situ stress relief and smooths the oxide profile. The taper of the foot provides a gradual increase in mask stiffness as oxidation proceeds, allowing for flexibility during rapid growth and increasing stiffness as the growth rate slows. This design significantly reduces shear stresses responsible for dislocation generation by as much as fifty-fold, leading to improved surface topography and suppression of oxide punch through and narrow oxide thinning effects.

Career Highlights

Vijai Kumar N Chhagan is associated with Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor technology. His innovative approaches have contributed to advancements in the manufacturing processes and overall performance of integrated circuits.

Collaborations

Throughout his career, Vijai has collaborated with notable professionals in the field, including Igor V Peidous and Quek Kiok Boone Elgin. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies in semiconductor manufacturing.

Conclusion

Vijai Kumar N Chhagan's contributions to semiconductor technology through his innovative designs and patents have made a significant impact on the industry. His work continues to influence advancements in integrated circuit technology, showcasing the importance of innovation in this field.