Company Filing History:
Years Active: 2012-2014
Title: Innovations by Victoria M Chaplick in Semiconductor Manufacturing
Introduction
Victoria M Chaplick is a notable inventor based in Charlton, MA (US), recognized for her contributions to semiconductor manufacturing. With a total of four patents to her name, she has developed innovative methods that enhance the efficiency and effectiveness of substrate edge processing.
Latest Patents
Among her latest patents is a method and apparatus for processing substrate edges. This invention addresses the limitations of conventional edge processing methods used in semiconductor manufacturing. It incorporates a laser and optical system that directs a beam of radiation onto a rotating substrate supported by a chuck, allowing for precise removal or transformation of films, residues, and particles from various edges of the substrate. An optional gas injector system further aids in the reaction, while process by-products are efficiently removed via an exhaust tube. This technology significantly improves die yield by allowing for precise control of an edge exclusion zone.
Another significant patent is the fiber-optic beam delivery system for wafer edge processing. This invention also utilizes a laser and fiber-optic system to direct laser radiation onto a rotating substrate. The method allows for the removal or transformation of films and residues in a single process step, replacing traditional methods that rely on large volumes of purified water and hazardous chemicals. This advancement not only enhances the efficiency of the process but also contributes to a safer working environment.
Career Highlights
Victoria M Chaplick is currently associated with Uvtech Systems, Inc., where she continues to innovate in the field of semiconductor manufacturing. Her work has been instrumental in developing technologies that improve the quality and yield of semiconductor products.
Collaborations
She has collaborated with notable colleagues such as Ronald P Millman, Jr. and Kenneth J Harte, contributing to the advancement of technologies in her field.
Conclusion
Victoria M Chaplick's innovative patents and contributions to semiconductor manufacturing demonstrate her significant impact on the industry. Her work not only enhances production efficiency but also promotes safer manufacturing practices.