Langenau, Germany

Uwe W Hamm


Average Co-Inventor Count = 1.9

ph-index = 2

Forward Citations = 13(Granted Patents)


Company Filing History:


Years Active: 2003-2004

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3 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Uwe W Hamm from Langenau, Germany

Introduction: Uwe W Hamm is a notable inventor based in Langenau, Germany, recognized for his contributions to the field of optical technology through his innovative inventions. With a total of three patents to his name, he has made significant strides in addressing challenges associated with optical beam guidance systems and contamination prevention in lithography devices.

Latest Patents: Uwe W Hamm's latest patents include the "Optical beam guidance system and method for preventing contamination of optical components contained therein." This invention focuses on reducing contamination of the optical components inside a beam guidance space defined by a specially designed frame. The frame surfaces are coated with a degassing barrier layer that minimizes reflectivity increases, making this method particularly valuable in UV light lithography systems.

Another significant patent is for a "Process and device for in-situ decontamination of a EUV lithography device." In this patent, Uwe presents a solution to the challenge of hydrocarbons and carbon compounds forming within EUV lithography devices. By continuously monitoring contamination levels and supplying oxygen to the device's interior during operation, the contamination is mitigated, effectively maintaining the reflectivity of optical elements.

Career Highlights: Throughout his career, Uwe has been associated with reputable organizations such as Carl Zeiss SMT AG and Carl Zeiss Stiftung, where he has honed his expertise in optical technologies. His work has directly contributed to advancements in lithography and optical systems, showcasing his commitment to innovation.

Collaborations: Uwe has collaborated with esteemed professionals in his field, including Ansgar Freitag and Ulrich Bingel. Their collective efforts have played a crucial role in the development of advanced solutions within optical technologies and methodologies.

Conclusion: Uwe W Hamm's contributions represent a significant impact on the fields of optics and lithography. His innovations not only address practical challenges in technology but also pave the way for future advancements. With his patented inventions, he continues to influence the industry and inspire fellow inventors.

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